Design for manufacturing validation tool: fast and reliable conversion of SEM images to GDS images

D. Ronning; D. Ducharme; R. Selzer; B. Boerger; M. Yu; B. Xing; M. Trybendis; B. Grenon

doi:10.1117/12.692747

21 June 2006 Design for manufacturing validation tool: fast and reliable conversion of SEM images to GDS images

D. Ronning, D. Ducharme, R. Selzer, B. Boerger, M. Yu, B. Xing, M. Trybendis, B. Grenon

Proceedings Volume 6281, 22nd European Mask and Lithography Conference; 62810Y (2006) https://doi.org/10.1117/12.692747
Event: 22nd European Mask and Lithography Conference, 2006, Dresden, Germany

Abstract

The ability to convert high resolution images from a Scanning Electron Microscope (SEM) of a printed lithographic pattern to a GDS image file which can be input into modeling software (such as litho-simulation, etc.) for rigorous analysis is a powerful tool. Its use can be expanded through the simplication of the SEM2GDS conversion procedure by automation of the tasks. In this paper, we describe our SEM2GDS and SCAN INTERFACE UNIT, which automates both SEM image collection and SEM2GDS conversion.

Citation Download Citation

D. Ronning, D. Ducharme, R. Selzer, B. Boerger, M. Yu, B. Xing, M. Trybendis, and B. Grenon "Design for manufacturing validation tool: fast and reliable conversion of SEM images to GDS images", Proc. SPIE 6281, 22nd European Mask and Lithography Conference, 62810Y (21 June 2006); https://doi.org/10.1117/12.692747

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available