Finding the needle in the haystack: using full-chip process window analysis to qualify competing SRAF placement strategies for 65 nm

Mark Mason; Shane Best; Gary Zhang; Mark Terry; Robert Soper

doi:10.1117/12.687008

20 October 2006 Finding the needle in the haystack: using full-chip process window analysis to qualify competing SRAF placement strategies for 65 nm

Mark Mason, Shane Best, Gary Zhang, Mark Terry, Robert Soper

Author Affiliations +

Proceedings Volume 6349, Photomask Technology 2006; 63491X (2006) https://doi.org/10.1117/12.687008
Event: SPIE Photomask Technology, 2006, Monterey, California, United States

Abstract

It is widely understood that the IC Industry's adherence to Moore's Law is widening the gap between the wavelength of light used in semiconductor manufacturing and the features that they define. Increasingly, the patterning community has turned to higher complexity imaging solutions to fill the gap. This steadily increasing complexity is placing a new burden on lithographers and resolution enhancement technology engineers to guarantee that the highly complex patterning strategies will work for all patterns. Traditionally, lithography strategies have been characterized using relatively simple one-dimensional "litho test patterns." Real circuits are highly randomized however, and complex two-dimensional interactions are the rule rather than the exception. This paper extends the paradigm for use of newly available post-OPC verification (POV) technology to the realm of RET development. We offer a case study where two competing 65-nm logic node sub-resolution assist feature (SRAF) strategies for poly layer patterning are evaluated on a full chip using commercially available post-OPC verification technology. We are able to evaluate differences in CD control process window, SRAF printability (illustrated in Figure 1), MEEF sensitivity, and catastrophic defect propensity. In several critical cases, we show silicon confirmation of the simulated results. This methodology allows leveraging of existing full-chip POV technology to enable the selection of the best SRAF strategy with minimal use of costly split lot silicon.

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Mark Mason, Shane Best, Gary Zhang, Mark Terry, and Robert Soper "Finding the needle in the haystack: using full-chip process window analysis to qualify competing SRAF placement strategies for 65 nm", Proc. SPIE 6349, Photomask Technology 2006, 63491X (20 October 2006); https://doi.org/10.1117/12.687008

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KEYWORDS

SRAF

Optical proximity correction

Resolution enhancement technologies

Optical lithography

Model-based design

Silicon

Lithography

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