An effective layout optimization method via LFD concept

Ching-Heng Wang; Zexi Deng; Gensheng Gao; Chi-Yuan Hung

doi:10.1117/12.685727

20 October 2006 An effective layout optimization method via LFD concept

Ching-Heng Wang, Zexi Deng, Gensheng Gao, Chi-Yuan Hung

Proceedings Volume 6349, Photomask Technology 2006; 63492Z (2006) https://doi.org/10.1117/12.685727
Event: SPIE Photomask Technology, 2006, Monterey, California, United States

Abstract

As the advent of advanced process technology such as 65nm and below, the designs become more and more sensitive to the variation of manufacturing process. Though the complicated design rules can guarantee process margin for the most layout environments, some layouts that pass the DRC still have narrow process windows. An effective layout optimization approach based on Litho Friendly Design (LFD), one of Mentor Graphics' products, was introduced to enhance design layout manufacturability. Additional to process window models and production proven Optical Proximity Correction (OPC) recipes, the LFD design kits are also generated and needed, which with the kits and rules people should guarantee no process window issues in a design if the design passes the check of these rules via the kits. Lastly, a real 65nm product Metal layer was applied full chip OPC and post-OPC checks to process variation. Some narrow process window layouts were detected and identified, then optimized for larger process window based on the advices provided by LFD. Both simulation and in-line data showed that the DOFs were improved after the layout optimization without changing the area, timing and power of the original design.

Citation Download Citation

Ching-Heng Wang, Zexi Deng, Gensheng Gao, and Chi-Yuan Hung "An effective layout optimization method via LFD concept", Proc. SPIE 6349, Photomask Technology 2006, 63492Z (20 October 2006); https://doi.org/10.1117/12.685727

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available