Utilize AIMS simulation to estimate profile side-wall angle

Colbert Lu; C. H. Lin; C. F. Wang

doi:10.1117/12.686469

20 October 2006 Utilize AIMS simulation to estimate profile side-wall angle

Colbert Lu, C. H. Lin, C. F. Wang

Proceedings Volume 6349, Photomask Technology 2006; 634943 (2006) https://doi.org/10.1117/12.686469
Event: SPIE Photomask Technology, 2006, Monterey, California, United States

Abstract

In the development of leading-edge devices, high-end mask is required and the spec request from mask users becomes more and more tight and complex. Mask users concern not only CD (critical dimension) uniformity, defect condition, registration/overlay, but also haze issue and better pattern profile. There are lots of items which are included in pattern profile, like line-end shortening, edge roughness, corner rounding and side-wall angle, etc. Mask shop's engineers always need to cut blanks and then get cross-section images at CD-SEM. But it wastes lots of time and money. In this paper we try to find the relationship between mask side-wall angle and simulated aerial image by using Carl Zeiss' Aerial Image Measurement System (AIMS^TM-fab). For the further study, we compare three types of E-beam writers and two types of etchers to recognize its effect on side-wall angle.

Citation Download Citation

Colbert Lu, C. H. Lin, and C. F. Wang "Utilize AIMS simulation to estimate profile side-wall angle", Proc. SPIE 6349, Photomask Technology 2006, 634943 (20 October 2006); https://doi.org/10.1117/12.686469

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