Scanning white-light interferometry for microstructures geometrical characterization

Tong Guo; Chun-guang Hu; Jin-ping Chen; Xing Fu; Xiao-tang Hu

doi:10.1117/12.717253

6 November 2006 Scanning white-light interferometry for microstructures geometrical characterization

Tong Guo, Chun-guang Hu, Jin-ping Chen, Xing Fu, Xiao-tang Hu

Proceedings Volume 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence; 63573O (2006) https://doi.org/10.1117/12.717253
Event: Sixth International Symposium on Instrumentation and Control Technology, 2006, Beijing, China

Abstract

Scanning white-light interferometry (SWLI) surface profiling for geometrical characterization and device inspection is described in this paper, which is quick, non-destructive, non-contact, and easy to carry out at the wafer scale with sub-micrometer lateral resolution and nanoscale vertical resolution. The measurement system is based on a Mirau microscopic interferometer, using a piezo objective nano-positioner to realize accurate scanning in vertical direction in the range of one hundred micrometers. It employs the method called centroid algorithm to extract the envelope peak position. Comparing with phase shifting interferometry, it has a large measurement range. The measurement accuracy of the system is calibrated by a step height standard which is certificated by NIST. A micro resonator is employed to illustrate the capabilities of SWLI as a measurement and process characterization tool.

Citation Download Citation

Tong Guo, Chun-guang Hu, Jin-ping Chen, Xing Fu, and Xiao-tang Hu "Scanning white-light interferometry for microstructures geometrical characterization", Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 63573O (6 November 2006); https://doi.org/10.1117/12.717253

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available