A silicon microelectromechanical resonant gyroscope

Yingying Wang; Shangchun Fan; Jie Ren; Zhanshe Guo

doi:10.1117/12.718007

28 October 2006 A silicon microelectromechanical resonant gyroscope

Yingying Wang, Shangchun Fan, Jie Ren, Zhanshe Guo

Proceedings Volume 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation; 63581F (2006) https://doi.org/10.1117/12.718007
Event: Sixth International Symposium on Instrumentation and Control Technology, 2006, Beijing, China

Abstract

This paper presents recent work on the design of a silicon microelectromechanical resonant gyroscope, and also describes the detailed principle of operation and simulation results with Matlab. The structure consists of comb drive actuators, a plate proof mass, lever mechanisms and double-ended tuning forks (DETF). The plate proof mass is driven by the comb drive actuators, and if an external rotation is applied, the Coriolis force acting on it is transmitted to the lever mechanisms attached. The lever mechanisms amplify the periodic force prior to being communicated axially onto the two symmetrical DETFs to provide a differential output. By demodulating the oscillators' frequency output, the rotation rate can then be estimated. This new design has several advantages including high sensitivity, high resolution and a quasi-digital FM output. Simulations include tests of the scale factor of the sensor and the resonant frequency of the DETF oscillators as a function of beam geometric parameters and the applied force.

Citation Download Citation

Yingying Wang, Shangchun Fan, Jie Ren, and Zhanshe Guo "A silicon microelectromechanical resonant gyroscope", Proc. SPIE 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation, 63581F (28 October 2006); https://doi.org/10.1117/12.718007

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