Paper
20 December 2006 Microfluidic device with asymmetric electrodes for cell and reagent delivery
Daniel Lee, Guolin Xu, Hong Kiat Tay, Chun Yang, Jackie Y. Ying
Author Affiliations +
Proceedings Volume 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III; 64150U (2006) https://doi.org/10.1117/12.695598
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2006, Adelaide, Australia
Abstract
We present the design and fabrication of a micro-electromechanical system (MEMS) device for cell and particle delivery using a combination of AC electrokinetic fluidic flow and negative dielectrophoresis (DEP) force. An array of interdigitated asymmetric microelectrode pairs were used in the planar device. The electrodes produced a net charge in the surrounding fluid, generating an AC electrokinetic fluidic motion. A non-uniform electric field with low actuation frequency from the microelectrode pairs resulted in a negative DEP force, which was responsible for pushing delivery particles away from sedimentation. The experimental results showed that the flow velocity increased rapidly from 267 μm/min to 394 μm/min when the applied frequency was increased from 10 kHz to 70 kHz for a cell-suspending medium buffer solution with a conductivity of 4.7 μS/cm. A maximum delivery velocity of 801 μm/min was obtained when the buffer conductivity was increased to 47 μS/cm with an actuation frequency of 100 kHz.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniel Lee, Guolin Xu, Hong Kiat Tay, Chun Yang, and Jackie Y. Ying "Microfluidic device with asymmetric electrodes for cell and reagent delivery", Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 64150U (20 December 2006); https://doi.org/10.1117/12.695598
Lens.org Logo
CITATIONS
Cited by 1 scholarly publication.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Electrodes

Dielectrophoresis

Microfluidics

Semiconducting wafers

Silicon

Particles

Deep reactive ion etching

Back to Top