Aluminum nanowire polarizing grids: fabrication and analysis

Vincent Pelletier; Koji Asakawa; Mingshaw Wu; Douglas H. Adamson; Richard A. Register; Paul M. Chaikin

doi:10.1117/12.698990

7 March 2007 Aluminum nanowire polarizing grids: fabrication and analysis

Vincent Pelletier, Koji Asakawa, Mingshaw Wu, Douglas H. Adamson, Richard A. Register, Paul M. Chaikin

Proceedings Volume 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII; 646217 (2007) https://doi.org/10.1117/12.698990
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

We have produced aluminum wire grids with 33 nm periodicity using a thin film of a self-assembling cylinder forming diblock copolymer as a template. These grids, supported on fused quartz wafers, function as transmission polarizers for visible and near-ultraviolet lights and are a thin design, compared to commercially available polarization prisms. Their polarization efficiency is measured to be near 50% in the visible. Quantitative comparison with a new theoretical analysis of such wire grids indicates that they should perform well into the far UV. This analysis also explains a reversal in polarization direction at short wavelengths which we observe in our specimens. This is an expanded version of a previous paper.¹

Citation Download Citation

Vincent Pelletier, Koji Asakawa, Mingshaw Wu, Douglas H. Adamson, Richard A. Register, and Paul M. Chaikin "Aluminum nanowire polarizing grids: fabrication and analysis", Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 646217 (7 March 2007); https://doi.org/10.1117/12.698990

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