MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and OCT imaging instruments

David L. Dickensheets

doi:10.1117/12.706699

9 February 2007 MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and OCT imaging instruments

David L. Dickensheets

Author Affiliations +

Proceedings Volume 6467, MEMS Adaptive Optics; 646707 (2007) https://doi.org/10.1117/12.706699
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

This paper explores the use of deformable membrane mirrors for primary focus control and spherical aberration correction in confocal microscopes and optical coherence tomography instruments that are miniaturized for in situ imaging. System requirements for membrane performance are explored for both high and low numerical aperture regimes. Examples of both confocal imaging and focus-tracking optical coherence tomography using vari-focus silicon nitride MEMS mirrors are presented. It is envisioned that future instruments with enhanced-stroke adaptive membrane mirrors will provide high fidelity microscopy and optical coherence tomography for diagnostic imaging of intact, living tissue.

Citation Download Citation

David L. Dickensheets "MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and OCT imaging instruments", Proc. SPIE 6467, MEMS Adaptive Optics, 646707 (9 February 2007); https://doi.org/10.1117/12.706699

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