Intelligent visualization of lithography violations

David Ziger

doi:10.1117/12.714515

21 March 2007 Intelligent visualization of lithography violations

David Ziger

Proceedings Volume 6521, Design for Manufacturability through Design-Process Integration; 65211E (2007) https://doi.org/10.1117/12.714515
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

New methods for visualizing process window effects on simulated lithography violations are shown. Three types of analysis of simulation errors are discussed. Worst site violations are those geometries in which at least one process condition shows largest deviations from target. For these errors, variations of Cleveland dot charts are useful for showing key attributes such pinpointing which process condition(s) cause the largest violations and the distribution of violations among focus and exposure conditions. Modifications of dot charts are also useful to visualize violations across the process window for the entire chip as opposed to selected sites. Lastly, linearity charts combined with box/whisker objects can be used to show deviations from target over a range of drawn dimensions.

Citation Download Citation

David Ziger "Intelligent visualization of lithography violations", Proc. SPIE 6521, Design for Manufacturability through Design-Process Integration, 65211E (21 March 2007); https://doi.org/10.1117/12.714515

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