Design and fabrication of OTFT based flexible piezoelectric sensor

Taeksoo Ji; Mayakuthan Kathiresan; Shiny Nair; Soyoun Jung; Venkatachalam Natarajan; Rama Mohan Rao Vishnubhatla; Vijay K. Varadan

doi:10.1117/12.735864

11 April 2007 Design and fabrication of OTFT based flexible piezoelectric sensor

Taeksoo Ji, Mayakuthan Kathiresan, Shiny Nair, Soyoun Jung, Venkatachalam Natarajan, Rama Mohan Rao Vishnubhatla, Vijay K. Varadan

Author Affiliations +

Proceedings Volume 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007; 65281P (2007) https://doi.org/10.1117/12.735864
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2007, San Diego, California, United States

Abstract

Design and fabrication of Organic Thin Film Transistor (OTFT) based miniaturized piezoelectric sensor is presented in this investigation. The device is fabricated on flexible polyethylene naphthalate (PEN) film, using the small-molecule hydrocarbon pentacene as the semiconductor layer and solution-processed polyvinylphenol as the gate dielectric. Field effect mobility of the OTFT is greater than 0.01 cm²/Vs, I_on/I_off current ratio greater than 10⁵. The piezoelectric polymer, Polyvinylidene Fluoride (PVDF) is used as the sensor layer that is attached over the extended gate metal electrode of the OTFT. OTFT, which is in close proximity with sensor, serves as the amplifier to amplify the signal generated by piezoelectric sensor.

Citation Download Citation

Taeksoo Ji, Mayakuthan Kathiresan, Shiny Nair, Soyoun Jung, Venkatachalam Natarajan, Rama Mohan Rao Vishnubhatla, and Vijay K. Varadan "Design and fabrication of OTFT based flexible piezoelectric sensor", Proc. SPIE 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007, 65281P (11 April 2007); https://doi.org/10.1117/12.735864

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