A complete set of the special process equipment for the defect-free production of reticles

Syarhei Avakaw; Valerian Iouditski; Leanid Pushkin; Alena Tsitko

doi:10.1117/12.736525

3 May 2007 A complete set of the special process equipment for the defect-free production of reticles

Syarhei Avakaw, Valerian Iouditski, Leanid Pushkin, Alena Tsitko

Proceedings Volume 6533, 23rd European Mask and Lithography Conference; 65331B (2007) https://doi.org/10.1117/12.736525
Event: European Mask and Lithography Conference2007, 2007, Grenoble, France

Abstract

The paper presents an integrated solution of a problem to develop a set of the equipment for the defect-free production of reticles and photomasks. The integrated approach to the equipment design allows to obtain certain advantages disclosed below. Accordingly, the paper highlights the following main issues: *Practical realization of these advantages in the special process equipment developed by the KBTEM-OMO enterprise of the PLANAR. *Advantages in the development of a complete set of the special process equipment; Without taking into account technical and chemical processes, this complete set includes three component parts: *Multi-beam laser pattern generator; *Die-to-Database reticle inspection system; *Laser reticle repair system.

Citation Download Citation

Syarhei Avakaw, Valerian Iouditski, Leanid Pushkin, and Alena Tsitko "A complete set of the special process equipment for the defect-free production of reticles", Proc. SPIE 6533, 23rd European Mask and Lithography Conference, 65331B (3 May 2007); https://doi.org/10.1117/12.736525

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