Nanometrology of microsystems: traceability problem in nanometrology

Iuliana Iordache; D. Apostol; O. Iancu; G. Stanciu; P. C. Logofatu; V. Damian; F. Garoi; B. Savu; M. Bojan

doi:10.1117/12.741833

7 May 2007 Nanometrology of microsystems: traceability problem in nanometrology

Iuliana Iordache, D. Apostol, O. Iancu, G. Stanciu, P. C. Logofatu, V. Damian, F. Garoi, B. Savu, M. Bojan

Proceedings Volume 6635, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies III; 663503 (2007) https://doi.org/10.1117/12.741833
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies III, 2006, Bucharest, Romania

Abstract

Proper calibration of any instrument is vital to an investigator's ability to compare laboratory experiments, as well as to draw quantitative relations between experimental results and the real objects. Traceability is a term used to certify an instrument's accuracy relative to a known standard. Because traceability to meter is a very expensive and complicated process, accurate and traceable calibration of lateral and vertical standards (e.g. 1D and 2D gratings) is a basic metrological task for nano- and micro- technology. On the other hand laser interferometry is the de facto method to transfer the meter standard to practical measurement. In this lecture, we describe interferometric vertical and lateral calibration of a grating used to quantify the parameters necessary for proper translation of AFM data into physically meaningful data.

Citation Download Citation

Iuliana Iordache, D. Apostol, O. Iancu, G. Stanciu, P. C. Logofatu, V. Damian, F. Garoi, B. Savu, and M. Bojan "Nanometrology of microsystems: traceability problem in nanometrology", Proc. SPIE 6635, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies III, 663503 (7 May 2007); https://doi.org/10.1117/12.741833

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