Phase metrology on 45-nm node phase-shift mask structures

Kyung M. Lee; Malahat Tavassoli; Ute Buttgereit; Dirk Seidel; Robert Birkner; Sascha Perlitz

doi:10.1117/12.772106

24 March 2008 Phase metrology on 45-nm node phase-shift mask structures

Kyung M. Lee, Malahat Tavassoli, Ute Buttgereit, Dirk Seidel, Robert Birkner, Sascha Perlitz

Proceedings Volume 6922, Metrology, Inspection, and Process Control for Microlithography XXII; 69222A (2008) https://doi.org/10.1117/12.772106
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

As PSM (Phase Shift Mask) process moves toward 45nm and 32nm node, phase control is becoming more important than ever. Both attenuated and alternating PSM need precise control of phase as a function of both pitch and target sizes. However conventional interferometer-based phase shift measurements are limited to large CD targets and requires custom designed target in order to function properly, which limits clear understanding and control of small target PSM features. New type of Phase metrology tool created by Zeiss, in collaboration with Intel has been introduced and Intel's 45nm node PSM targets have been measured. In this paper we present test results from AAPSM/EAPSM targets with space CDs down to 45nm a wafer-level. Smallest pitch was 300nm print pitch, 150nm CD at mask (75nm pitch at wafer). In addition to this, phase and transmission matching between conventional phase metrology tool and new tool has been investigated and shown.

Citation Download Citation

Kyung M. Lee, Malahat Tavassoli, Ute Buttgereit, Dirk Seidel, Robert Birkner, and Sascha Perlitz "Phase metrology on 45-nm node phase-shift mask structures", Proc. SPIE 6922, Metrology, Inspection, and Process Control for Microlithography XXII, 69222A (24 March 2008); https://doi.org/10.1117/12.772106

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available