Progress with MEMS based UGS (IR/THz)

D. Grbovic; S. Rajic; N. V. Lavrik; P. G. Datskos

doi:10.1117/12.786633

16 April 2008 Progress with MEMS based UGS (IR/THz)

D. Grbovic, S. Rajic, N. V. Lavrik, P. G. Datskos

Proceedings Volume 6963, Unattended Ground, Sea, and Air Sensor Technologies and Applications X; 696317 (2008) https://doi.org/10.1117/12.786633
Event: SPIE Defense and Security Symposium, 2008, Orlando, Florida, United States

Abstract

The sensor community has long been presented with the problem of prioritizing among several competing sensor system variables due to the inability to produce a high confidence, low-cost, reliable, and compact device. Typically a solution for very critical scenarios has been a high-cost scale reduction of larger laboratory based instrumentation. This often produced data on a single parameter that is beyond reproach, however this can also produce a very delicate, bulky, and costly system often requiring a vacuum system of some sort. An alternative approach involves using micro-electro-mechanical systems (MEMS) based sensors. This typically results in low-cost and extremely compact devices that often produce dubious or insufficient data. Our approach integrates multiple orthogonal stimuli within a single chip to produce a MEMS based sensor that has a very high degree of signal confidence. Each individual sensed parameter may not produce very high-confidence data, but the combination of multiple independent parameters significantly improves detection reliability in a small low-cost package. In this work we address the integration of THz to our traditional MEMS based IR sensor elements. Also it is very significant that we can now produce IR images at atmospheric pressures which enables the integration of chemical and biological sensing within the same MEMS array.

Citation Download Citation

D. Grbovic, S. Rajic, N. V. Lavrik, and P. G. Datskos "Progress with MEMS based UGS (IR/THz)", Proc. SPIE 6963, Unattended Ground, Sea, and Air Sensor Technologies and Applications X, 696317 (16 April 2008); https://doi.org/10.1117/12.786633

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available