Micro-vibration measurement using self-mixing interferometer based on temporal carrier phase shifting technique

Hui Hao; Ming Wang; Dongmei Guo

doi:10.1117/12.807013

2 February 2009 Micro-vibration measurement using self-mixing interferometer based on temporal carrier phase shifting technique

Hui Hao, Ming Wang, Dongmei Guo

Author Affiliations +

Proceedings Volume 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications; 71600W (2009) https://doi.org/10.1117/12.807013
Event: International Conference of Optical Instrument and Technology, 2008, Beijing, China

Abstract

A new self-mixing interferometer (SMI) based on temporal carrier phase shifting technique is presented. Self-mixing interference occurs in the laser cavity by reflecting the light from a mirror-like target in front of the laser. Triangular phase modulation of the beam is obtained by an electrooptic modulator (EOM) in the external cavity. The phase of SMI signal coming from the photodetector is extracted by the phase shift demodulation algorithm based on sampling technique. Theoretical analysis and simulation calculations are presented and some errors of this method are discussed. The interferometer is applied to measure the Micro-vibration of a high-precision commercial PZT with an accuracy of <10nm.

Citation Download Citation

Hui Hao, Ming Wang, and Dongmei Guo "Micro-vibration measurement using self-mixing interferometer based on temporal carrier phase shifting technique", Proc. SPIE 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications, 71600W (2 February 2009); https://doi.org/10.1117/12.807013

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available