Biosensing microsystem platforms based on the integration of Si Mach-Zehnder interferometer, microfluidics and grating couplers

L. M. Lechuga; K. Zinoviev; L. Fernández; J. Elizalde; O. E. Hidalgo; C. Dominguez

doi:10.1117/12.809166

17 February 2009 Biosensing microsystem platforms based on the integration of Si Mach-Zehnder interferometer, microfluidics and grating couplers

L. M. Lechuga, K. Zinoviev, L. Fernández, J. Elizalde, O. E. Hidalgo, C. Dominguez

Author Affiliations +

Proceedings Volume 7220, Silicon Photonics IV; 72200L (2009) https://doi.org/10.1117/12.809166
Event: SPIE OPTO: Integrated Optoelectronic Devices, 2009, San Jose, California, United States

Abstract

We have achieved the design, fabrication and packaging of microfluidic networks with photonic sensors for novel labon- chip platforms which incorporate the on-chip biosensing detection. As sensors, we used an integrated Mach-Zehnder interferometer (MZI) based on TIR waveguides (Si/SiO₂/Si₃N₄) of micro/nanodimensions for evanescent field detection of biomolecular interactions onto the sensing areas. For the lab-on-a-chip development, the biosensors have been integrated with a 3D microfluidic polymer network. In addition, we have developed a novel hybrid device for coupling light into the waveguides of the Mach-Zehnder sensor. The coupling hybrid device is composed of a thin film of diffraction gratings fixed to a polydimethylsiloxane film. The optical characterization has shown the excellent compatibility and integration between fabrication technologies of silicon MZI, SU-8 polymer microfluidic network and mountable grating couplers.

Citation Download Citation

L. M. Lechuga, K. Zinoviev, L. Fernández, J. Elizalde, O. E. Hidalgo, and C. Dominguez "Biosensing microsystem platforms based on the integration of Si Mach-Zehnder interferometer, microfluidics and grating couplers", Proc. SPIE 7220, Silicon Photonics IV, 72200L (17 February 2009); https://doi.org/10.1117/12.809166

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