Paper
30 December 2008 Element count reduction of a thermo-resistive hot-wire anemometer
Author Affiliations +
Proceedings Volume 7268, Smart Structures, Devices, and Systems IV; 72680R (2008) https://doi.org/10.1117/12.810210
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2008, Melbourne, Australia
Abstract
A MEMS hot wire anemometer consisting of thermoresistive elements arranged in a differential bridge configuration is presented. The arrangement of the elements allows for dedicated heating elements to be omitted from the device without compromising operation or accuracy. Overall power consumption gives velocity and the temperature differential of each element pair is used for direction and has demonstrated a sensing resolution better than 1% and a repeatable accuracy better than 2%. Field trials have demonstrated a robust design with exposure to rain, dust and debris for a period in excess of 12 months with continuing operation.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. J. Adamec "Element count reduction of a thermo-resistive hot-wire anemometer", Proc. SPIE 7268, Smart Structures, Devices, and Systems IV, 72680R (30 December 2008); https://doi.org/10.1117/12.810210
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KEYWORDS
Chemical elements

Convection

Silicon

Sensors

Modeling

Temperature metrology

Thermal sensing

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