Exact locating of sub-surface microelectronic structures using scanning thermal-wave microscopy

Jaehun Chung; Kyeongtae Kim; Gwangseok Hwang; Ohmyoung Kwon; Joon Sik Lee; Seungho Park; Young Ki Choi

doi:10.1117/12.810688

30 December 2008 Exact locating of sub-surface microelectronic structures using scanning thermal-wave microscopy

Jaehun Chung, Kyeongtae Kim, Gwangseok Hwang, Ohmyoung Kwon, Joon Sik Lee, Seungho Park, Young Ki Choi

Proceedings Volume 7268, Smart Structures, Devices, and Systems IV; 72681V (2008) https://doi.org/10.1117/12.810688
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2008, Melbourne, Australia

Abstract

With the fast advance of ultra large scale integrated (ULSI) circuit technology, the need for sub-surface imaging technique to locate and characterize sub-surface defects in ULSI circuits has been growing. In this study we advance scanning thermal wave microscopy further so that the absolute phase lag of the thermal waves generated by an electrically heated sub-surface microelectronic structure buried in an ULSI circuit can be measured. The measurement of the absolute phase lag allowed exact locating of the vertical and horizontal position of buried microelectronic structures and evaluation of their soundness nondestructively.

Citation Download Citation

Jaehun Chung, Kyeongtae Kim, Gwangseok Hwang, Ohmyoung Kwon, Joon Sik Lee, Seungho Park, and Young Ki Choi "Exact locating of sub-surface microelectronic structures using scanning thermal-wave microscopy", Proc. SPIE 7268, Smart Structures, Devices, and Systems IV, 72681V (30 December 2008); https://doi.org/10.1117/12.810688

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available