Paper
30 December 2008 Investigation of the performance of micro-thermoelectric coolers
Z. W. Zhong, W. Fan, C. W. Low
Author Affiliations +
Proceedings Volume 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV; 72690V (2008) https://doi.org/10.1117/12.808068
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2008, Melbourne, Australia
Abstract
In this study, the performance of two micro-thermoelectric coolers fabricated was investigated by theoretical calculation and experimental testing of the samples. The natural convection rate and conduction rate were also considered. The corrective implementation improved the theoretical calculation results.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Z. W. Zhong, W. Fan, and C. W. Low "Investigation of the performance of micro-thermoelectric coolers", Proc. SPIE 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV, 72690V (30 December 2008); https://doi.org/10.1117/12.808068
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KEYWORDS
Convection

Semiconducting wafers

Copper

Temperature metrology

Tantalum

Technetium

Ceramics

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