Ion-implanted compliant electrodes for mm-size dielectric elastomer actuators

Samuel Rosset; Muhamed Niklaus; Philippe Dubois; Herbert R. Shea

doi:10.1117/12.815183

6 April 2009 Ion-implanted compliant electrodes for mm-size dielectric elastomer actuators

Samuel Rosset, Muhamed Niklaus, Philippe Dubois, Herbert R. Shea

Proceedings Volume 7287, Electroactive Polymer Actuators and Devices (EAPAD) 2009; 72870C (2009) https://doi.org/10.1117/12.815183
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2009, San Diego, California, United States

Abstract

The miniaturization of dielectric elastomer actuators requires compliant electrodes that are clean, reliable, and that can be easily patterned on a mm or μm scale. Carbon-based electrodes, which are commonly used to make large-scale actuators, are not well suited for this application. Metal ion implantation at low energies has, on the other hand, the ability to create compliant and patternable electrode through the creation of nanometer scale clusters in the first tens of nanometers below the elastomer surface. We present the mechanical and electrical properties of metal (Au, Pd, Ti, Cu) implanted electrodes on polydimethylsiloxane, as well as the application of Au-implanted electrode to the fabrication of small-size (∅1.5-3 mm) diaphragm actuators that exhibit vertical displacements up to 25% of their diameter.

Citation Download Citation

Samuel Rosset, Muhamed Niklaus, Philippe Dubois, and Herbert R. Shea "Ion-implanted compliant electrodes for mm-size dielectric elastomer actuators", Proc. SPIE 7287, Electroactive Polymer Actuators and Devices (EAPAD) 2009, 72870C (6 April 2009); https://doi.org/10.1117/12.815183

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available