Development and testing of a MEMS piezoelectric energy harvester

Ryan R. Knight; Changki Mo; William W. Clark

doi:10.1117/12.815533

6 April 2009 Development and testing of a MEMS piezoelectric energy harvester

Ryan R. Knight, Changki Mo, William W. Clark

Proceedings Volume 7288, Active and Passive Smart Structures and Integrated Systems 2009; 72880A (2009) https://doi.org/10.1117/12.815533
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2009, San Diego, California, United States

Abstract

This paper presents a finite element analysis of an interdigitated ( d₃₃ ) piezoelectric unimorph cantilever beam for harvesting vibration energy. The key feature that is analyzed is the poling behavior of the piezoelectric material. While simplified models of interdigitated piezoelectric devices assume some uniform and well-defined poling pattern, the finite element modeling shows that not to be the case. In this paper, a "percent poling factor" is developed with which to capture the real losses associated with non-uniform poling. A parametric study is carried out in which electrode patterns, piezoelectric layer dimensions and electrode dimensions are varied to see their effect on this percent poling factor. Optimal parameters are pointed out. Finally, experimental energy harvesting results for a micro-scale interdigitated beam are presented.

Citation Download Citation

Ryan R. Knight, Changki Mo, and William W. Clark "Development and testing of a MEMS piezoelectric energy harvester", Proc. SPIE 7288, Active and Passive Smart Structures and Integrated Systems 2009, 72880A (6 April 2009); https://doi.org/10.1117/12.815533

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