Analysis and modeling of a silicon nitride slot-waveguide microring resonator biochemical sensor

Carlos Angulo Barrios

doi:10.1117/12.820172

18 May 2009 Analysis and modeling of a silicon nitride slot-waveguide microring resonator biochemical sensor

Carlos Angulo Barrios

Proceedings Volume 7356, Optical Sensors 2009; 735605 (2009) https://doi.org/10.1117/12.820172
Event: SPIE Optics + Optoelectronics, 2009, Prague, Czech Republic

Abstract

The performance of a recently demonstrated silicon nitride slot-waveguide microring resonator biochemical sensor is analyzed. The slot-waveguide sensor is optically modeled by using finite element method, full-vectorial and semi-vectorial finite-difference beam propagation methods. Numerical calculations are discussed and compared to the sensor experimental performance. This study includes homogeneous sensing -by using different aqueous solutions-, surface sensing -due to both, surface etching and biomolecular layer adhesion-, and power coupling characteristics of the microring sensor. It is found that all of the aforementioned numerical methods provide good agreement with the experimental homogeneous sensitivity, surface etching sensitivity and power transmission coefficient at the resonator coupling. The analysis of the surface sensitivity due to biomolecular layer adhesion suggests biomolecule polymerization on the surface of the actual device. These results demonstrate the suitability of the proposed numerical optical models and indicate that the slot-waveguide microring device can be fully wetted with aqueous analytes, which is desirable for sensing and optofluidic applications at the nanoscale.

Citation Download Citation

Carlos Angulo Barrios "Analysis and modeling of a silicon nitride slot-waveguide microring resonator biochemical sensor", Proc. SPIE 7356, Optical Sensors 2009, 735605 (18 May 2009); https://doi.org/10.1117/12.820172

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