Characterization of tin vapor from CO[sub]2[/sub] laser produced EUV light source

Yoshifumi Ueno; Tatsuya Yanagida; Takashi Suganuma; Hiroshi Komori; Akira Sumitani; Akira Endo

doi:10.1117/12.820966

18 May 2009 Characterization of tin vapor from CO₂ laser produced EUV light source

Yoshifumi Ueno, Tatsuya Yanagida, Takashi Suganuma, Hiroshi Komori, Akira Sumitani, Akira Endo

Proceedings Volume 7361, Damage to VUV, EUV, and X-Ray Optics II; 73610X (2009) https://doi.org/10.1117/12.820966
Event: SPIE Optics + Optoelectronics, 2009, Prague, Czech Republic

Abstract

We evaluated basic characteristics of energetic plasma ions and neutrals, and of low-energy fragments (e.g. evaporated material and liquid micro-droplets) from a Tin (Sn) plasma produced by a CO2 (10.6 m) or Nd:YAG (1064 nm) laser. Experiments were performed with free-standing liquid droplet, semi-fixed liquid droplet and fixed solid droplet targets. Characteristics of energetic plasma ions, neutrals and fragments were measured by Faraday Cups, laser-induced fluorescence (LIF) imaging and shadowgraph imaging, respectively. The Sn ions were emitted towards the laser incident direction with a velocity of 10 ~ 100 km/s (kinetic energy of 0.06 ~ 6 keV) and the fragments (the majority of the target material) ejected in the same direction as laser pulse at a velocity of 10 ~ 500m/s. The neutrals were emitted in all directions from the target with a velocity of 5 ~ 40 km/s (kinetic energy of 0.015 ~ 1 keV).

Citation Download Citation

Yoshifumi Ueno, Tatsuya Yanagida, Takashi Suganuma, Hiroshi Komori, Akira Sumitani, and Akira Endo "Characterization of tin vapor from CO₂ laser produced EUV light source", Proc. SPIE 7361, Damage to VUV, EUV, and X-Ray Optics II, 73610X (18 May 2009); https://doi.org/10.1117/12.820966

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