Sensing performance of a Shack Hartmann wavefront sensor versus the properties of the light beam

L. P. Zhao; W. J. Guo; X. Li; Z. W. Zhong

doi:10.1117/12.827327

17 June 2009 Sensing performance of a Shack Hartmann wavefront sensor versus the properties of the light beam

L. P. Zhao, W. J. Guo, X. Li, Z. W. Zhong

Proceedings Volume 7390, Modeling Aspects in Optical Metrology II; 73900E (2009) https://doi.org/10.1117/12.827327
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

A Shack-Hartmann wavefront sensor (SHWS) uses a lenslet array to sample incoming wavefront on an image sensor, which is usually a Charge Coupled Device (CCD). By measuring the shift of centroids on CCD compared to reference spots, wavefront profile is reconstructed and therefore test surface shape is revealed. There are various factors that affect the performance of SHWS. In order to study how and to which extend does each factor affect reconstruction result, we established a simulation platform for SHWS in MATLAB. Through this platform, detailed properties and affecting factors were analyzed. Based on the system-oriented platform, we obtained some interesting findings, which are very important in the design of S-H wavefront sensors. In this paper, the performance-affecting significance of the key properties of the light beam, the diverging angle, the intensity distribution, and the intensity of the light beam, is simulated, analyzed and concluded. The simulation results are useful guide for the selection, design and preparation of the sensing light beam.

Citation Download Citation

L. P. Zhao, W. J. Guo, X. Li, and Z. W. Zhong "Sensing performance of a Shack Hartmann wavefront sensor versus the properties of the light beam", Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 73900E (17 June 2009); https://doi.org/10.1117/12.827327

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available