Duplicated quartz template for 2.5 inch discrete track media

Noriko Yamashita; Tadashi Oomatsu; Satoshi Wakamatsu; Katsuhiro Nishimaki; Toshihiro Usa; Kazuyuki Usuki

doi:10.1117/12.833466

23 September 2009 Duplicated quartz template for 2.5 inch discrete track media

Noriko Yamashita, Tadashi Oomatsu, Satoshi Wakamatsu, Katsuhiro Nishimaki, Toshihiro Usa, Kazuyuki Usuki

Proceedings Volume 7488, Photomask Technology 2009; 74880W (2009) https://doi.org/10.1117/12.833466
Event: SPIE Photomask Technology, 2009, Monterey, California, United States

Abstract

The Nano Imprint Lithography (NIL) process has been proposed as a method of making Discrete Track Media (DTM) for the next generation hard disc. The UV-NIL process is especially practical because of its minimal thermal expansion and high manufacturing throughput. Quartz template fabrication is a key issue in UV-NIL. Duplication from a Si master using NIL was studied as a method of such quartz template fabrication. In this method, the UV light radiated through the quartz substrate to reach the resist. This method avoids typically used Cr (and other hard masks) on the quartz substrate, eliminating the problem of low throughput caused by low transmission efficiency of the hard mask. The success of this method therefore depends crucially on the etching selectivity of quartz to NIL resist used as the resist mask. Using a newly developed NIL resist with high etching selectivity and duplicating by a "hard mask-less" method, a 125nm track pitch (TP), 2.5 inch full-surface quartz template with uniform pattern height was fabricated. A 75nm TP quartz template of 60nm pattern height was also fabricated using this method.

Citation Download Citation

Noriko Yamashita, Tadashi Oomatsu, Satoshi Wakamatsu, Katsuhiro Nishimaki, Toshihiro Usa, and Kazuyuki Usuki "Duplicated quartz template for 2.5 inch discrete track media", Proc. SPIE 7488, Photomask Technology 2009, 74880W (23 September 2009); https://doi.org/10.1117/12.833466

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