Engineered nanowires, carbon nanotubes and graphene for sensors, actuators and electronics

E. H. Yang

doi:10.1117/12.840439

4 February 2010 Engineered nanowires, carbon nanotubes and graphene for sensors, actuators and electronics

E. H. Yang

Proceedings Volume 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX; 75920N (2010) https://doi.org/10.1117/12.840439
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

We are exploring nanoelectronic engineering areas based on low dimensional materials, including carbon nanotubes and graphene. Our primary research focus is investigating carbon nanotube and graphene architectures for field emission applications, energy harvesting and sensing. In a second effort, we are developing a high-throughput desktop nanolithography process. Lastly, we are studying nanomechanical actuators and associated nanoscale measurement techniques for re-configurable arrayed nanostructures with applications in antennas, remote detectors and biomedical nanorobots. The devices we fabricate, assemble, manipulate and characterize potentially have a wide range of applications including sensors, detectors, system-on-a-chip, system-in-a-package, programmable logic controls, energy storage systems and allelectronic systems.

Citation Download Citation

E. H. Yang "Engineered nanowires, carbon nanotubes and graphene for sensors, actuators and electronics", Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 75920N (4 February 2010); https://doi.org/10.1117/12.840439

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