Shaping light: MOEMS deformable mirrors for microscopes and telescopes

Thomas Bifano

doi:10.1117/12.848221

18 February 2010 Shaping light: MOEMS deformable mirrors for microscopes and telescopes

Thomas Bifano

Proceedings Volume 7595, MEMS Adaptive Optics IV; 759502 (2010) https://doi.org/10.1117/12.848221
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

Micromachined deformable mirrors (DMs) have enabled rapid advances in applications ranging from large telescope astronomy and free space laser communication to biological microscopy and retinal imaging over the past decade. In this talk I describe our efforts at Boston University and at Boston Micromachines Corporation to design, fabricate, and control MOEMS DMs for adaptive optics (AO) applications. Integration of the DMs in AO systems is described, along with results demonstrating unprecedented advances in resolution and contrast in microscopes and telescopes challenged by unavoidable wavefront aberrations. MEMS-DM research offers the rare opportunity to introduce technology that is both more economical and more capable than the state-of-the-art.

Citation Download Citation

Thomas Bifano "Shaping light: MOEMS deformable mirrors for microscopes and telescopes", Proc. SPIE 7595, MEMS Adaptive Optics IV, 759502 (18 February 2010); https://doi.org/10.1117/12.848221

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available