Fabrication and optimization of Tantalum pentoxide waveguides for optical micro-propulsion

Balpreet Singh Ahluwalia; Olav Gaute Hellesø; Ananth Z. Subramanian; Nicolas M. B. Perney; Neil P. Sessions; James S. Wilkinson

doi:10.1117/12.840393

11 February 2010 Fabrication and optimization of Tantalum pentoxide waveguides for optical micro-propulsion

Balpreet Singh Ahluwalia, Olav Gaute Hellesø, Ananth Z. Subramanian, Nicolas M. B. Perney, Neil P. Sessions, James S. Wilkinson

Author Affiliations +

Proceedings Volume 7604, Integrated Optics: Devices, Materials, and Technologies XIV; 76040W (2010) https://doi.org/10.1117/12.840393
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

Design, fabrication and optimization of high refractive index (2.1 @ 1070 nm), sub-micron thickness (200 nm) Tantalum Pentoxide waveguides is reported. Optimization of fabrication parameters reduces the propagation loss to ~ 1 dB/cm @ 1070 nm for Ta₂O₅ waveguides. Ta₂O₅ waveguides were found to be stable for high power application with no significant absorption peaks over a large range of wavelengths (600-1700 nm). Ta₂O₅ waveguides provide high intensity in the evanescent field, which is useful for efficient optical propelling of micro-particles. We have employed Ta₂O₅ waveguide to propel polystyrene micro-particles with 50 μm/s velocity.

Citation Download Citation

Balpreet Singh Ahluwalia, Olav Gaute Hellesø, Ananth Z. Subramanian, Nicolas M. B. Perney, Neil P. Sessions, and James S. Wilkinson "Fabrication and optimization of Tantalum pentoxide waveguides for optical micro-propulsion", Proc. SPIE 7604, Integrated Optics: Devices, Materials, and Technologies XIV, 76040W (11 February 2010); https://doi.org/10.1117/12.840393

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available