Low-temperature Si/Si wafer bonding using boride-treated surface

Hailan Song; Hui Huang; Xiaomin Ren; Wenjuan Wang; Yongqing Huang

doi:10.1117/12.851765

2 December 2009 Low-temperature Si/Si wafer bonding using boride-treated surface

Hailan Song, Hui Huang, Xiaomin Ren, Wenjuan Wang, Yongqing Huang

Proceedings Volume 7631, Optoelectronic Materials and Devices IV; 76312I (2009) https://doi.org/10.1117/12.851765
Event: Asia Communications and Photonics, 2009, Shanghai, Shanghai , China

Abstract

An approach for Si/Si wafer bonding based on boride-solution treatment was presented. The bonding energy is higher than the Si fracture energy by annealing at 180°C. The properties of the bonded structures were studied in terms of the interface shape, electrical and optical characteristic through scanning electron microscopy (SEM), interface I-V curve, and so on. In this method, the surfaces of two wafers are active by Boride solution, and then following a thermal annealing process. The bonding strength was found to be sufficiently high and could withstand the subsequent etching and polishing procedures of the bonded wafers. This low temperature wafer bonding technology can be used in Optic Electronics Integrated Circuit and this technology with potential to meet a broad range of future telecommunication and computing systems' needs.

Citation Download Citation

Hailan Song, Hui Huang, Xiaomin Ren, Wenjuan Wang, and Yongqing Huang "Low-temperature Si/Si wafer bonding using boride-treated surface", Proc. SPIE 7631, Optoelectronic Materials and Devices IV, 76312I (2 December 2009); https://doi.org/10.1117/12.851765

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available