Magnetostrictive properties of Tb0.24Dy0.76Fe2-xNix thin films for wireless micro actuators and application to array type micro transporter

Heung-Shik Lee; Bongjun Kim; Chongdu Cho

doi:10.1117/12.848894

30 March 2010 Magnetostrictive properties of Tb_0.24Dy_0.76Fe_2-xNi_x thin films for wireless micro actuators and application to array type micro transporter

Heung-Shik Lee, Bongjun Kim, Chongdu Cho

Author Affiliations +

Proceedings Volume 7644, Behavior and Mechanics of Multifunctional Materials and Composites 2010; 76440X (2010) https://doi.org/10.1117/12.848894
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2010, San Diego, California, United States

Abstract

In this paper, wireless optical system was developed by using array type TbDyFeNi thin film actuator. The effect of Ni content on the magneto-mechanical properties of the Tb_0.24Dy_0.76Fe₂ system, for wireless micro actuator with the effect of deposited film thickness of TbDyFeNi on silicon substrate, was also investigated. To create the device, array shape silicon substrates were bulk micromachined, and Tb_0.24Dy_0.76Fe_2-xNi_x, (x=0, 0.5, 1.2, 2.0) films were sputter-deposited on the back side of substrate by selective DC magnetron sputtering techniques. After the sputter process, magnetization and effective mgnetoelastic coupling coefficient and magnetostriction of the sample were measured for the magnetomechanical characterizaztion. For the operation, each branch of the array type actuator has different length and out-ofplane motion. Each branch was actuated by externally applied magnetic fields up to 0.5T and motion of the branches made inclined movement. As a result, deflected angle of the actuator due to the movement of array type actuator to external magnetic fields were observed.

Citation Download Citation

Heung-Shik Lee, Bongjun Kim, and Chongdu Cho "Magnetostrictive properties of Tb_0.24Dy_0.76Fe_2-xNi_x thin films for wireless micro actuators and application to array type micro transporter", Proc. SPIE 7644, Behavior and Mechanics of Multifunctional Materials and Composites 2010, 76440X (30 March 2010); https://doi.org/10.1117/12.848894

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KEYWORDS

Magnetism

Actuators

Nickel

Thin films

Magnetostrictive materials

Silicon

Sputter deposition

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