Novel metrological tuning fork atomic force microscope for optical surface characterization

Jian Zhao; Tong Guo; Long Ma; Xing Fu; Xiaotang Hu

doi:10.1117/12.864039

11 October 2010 Novel metrological tuning fork atomic force microscope for optical surface characterization

Jian Zhao, Tong Guo, Long Ma, Xing Fu, Xiaotang Hu

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76560G (2010) https://doi.org/10.1117/12.864039
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

A novel metrological tuning fork atomic force microscope (M-TFAFM) with an Abbe error free design is presented, which is aimed at traceable topographic and non-destructive characterization of the optical surfaces. Unlike the traditional AFM, the M-TFAFM does not need any optical detector to measure the bending of the cantilever, significantly saving the working space. A z-axis piezoelectric positioning stage (z-PPS), with high resonant frequency, is responsible for the rapid motion of the sample in z-direction. A high-end digital signal processing (DSP) servo control system further guarantees high measurement speed. A nano-measuring machine (NMM) is equipped as the lateral moving stage to realize three-dimensional measurement of the optical surfaces. Three interferometers in the NMM enable the measurement to be traced to the meter definition. In order to enhance the reliability of measurement, a convenient calibration method is designed. The results of the experiments show a good performance of the system.

Citation Download Citation

Jian Zhao, Tong Guo, Long Ma, Xing Fu, and Xiaotang Hu "Novel metrological tuning fork atomic force microscope for optical surface characterization", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76560G (11 October 2010); https://doi.org/10.1117/12.864039

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KEYWORDS

Sensors

Digital signal processing

Calibration

Interferometers

Atomic force microscopy

Metrology

Optical testing

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