Transmission-type angle deviation microscope with NA=0.65 for 3D measurement

Ming-Hung Chiu; Chin-Fa Lai; Chen-Tai Tan; Yi-Zhi Lin

doi:10.1117/12.850984

3 June 2010 Transmission-type angle deviation microscope with NA=0.65 for 3D measurement

Ming-Hung Chiu, Chin-Fa Lai, Chen-Tai Tan, Yi-Zhi Lin

Proceedings Volume 7729, Scanning Microscopy 2010; 77291G (2010) https://doi.org/10.1117/12.850984
Event: Scanning Microscopy 2010, 2010, Monterey, California, United States

Abstract

Transmission-type laser scanning angle deviation microscopy (TADM) with NA=0.65 for three dimension (3D) measurement is presented. It is based on the theorems of geometrical angular deviation and surface plasmon resonance (SPR) and the use of the common-path heterodyne interferometry. When a laser beam defocuses on the surface of a transparent sample, the transmission light will be deviated a small angle from the optical axis and the deviation angle is proportional to the defocus length and the square of the numerical aperture. We used a SPR angular sensor and the common-path heterodyne interferometry to measure this deviation angle. Scanning the sample, the phase profile was measured and transferred to surface height pattern, the 3D surface profile was obtained in real-time. The results showed that the dynamic range and lateral and axial resolutions were equal to ±5.6 μm, 0.3 μm, and 3 nm, respectively.

Citation Download Citation

Ming-Hung Chiu, Chin-Fa Lai, Chen-Tai Tan, and Yi-Zhi Lin "Transmission-type angle deviation microscope with NA=0.65 for 3D measurement", Proc. SPIE 7729, Scanning Microscopy 2010, 77291G (3 June 2010); https://doi.org/10.1117/12.850984

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available