Paper
8 February 2011 Advanced fabrication methods for 3D meta-optics
Author Affiliations +
Abstract
Micro-Optics has expanded to include a wide variety of applications for spectral filtering, polarization filtering and beam shaping. Recently, a new class of optical elements have been introduced that can combine the spectral, polarization, and beam conditioning into the same optical element. This engineered optical functionality results in a 3D Meta-Optic structure that relies on sub-wavelength features to essentially engineer the electromagnetic fields within the structure; thereby, resulting in highly dispersive structures that spatially vary across the optical element. This talk will summarize recent results in the design, fabrication and applications of 3D Meta-Optics.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. G. Johnson, M. K. Poutous, Z. A. Roth, P. Srinivasan, A. J. Pung, and Y. O. Yilmaz "Advanced fabrication methods for 3D meta-optics", Proc. SPIE 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV, 792706 (8 February 2011); https://doi.org/10.1117/12.877173
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Photomasks

Analog electronics

Lithography

Critical dimension metrology

Optical filters

Optical components

Photoresist materials

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