Fabrication of guided mode resonance filters on conformal surfaces

A. T. Cannistra; M. K. Poutous; E. G. Johnson; T. J. Suleski

doi:10.1117/12.876280

14 February 2011 Fabrication of guided mode resonance filters on conformal surfaces

A. T. Cannistra, M. K. Poutous, E. G. Johnson, T. J. Suleski

Proceedings Volume 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV; 79270Y (2011) https://doi.org/10.1117/12.876280
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

The guided mode resonance (GMR) phenomena has been studied and exploited for applications in sensors, polarizers, dichroic laser mirrors, and more. These micro-optical structures serve as highly functional devices capable of narrowband spectral filtering. Their relatively simple design includes a subwavelength periodically modulated index layer and a waveguiding layer. This configuration yields efficient and easily tunable devices over a broad range of wavelengths. Currently GMR filters have been fabricated exclusively on flat surfaces. In this paper, we demonstrate fabrication of GMR filters on conformal surfaces using non-traditional techniques. Flexible molds are used as replication templates in a micro-transfer molding process. SU-8 negative photoresist serves as the molded polymer with good thermal characteristics compatible with subsequent deposition of dielectric layers. Fabrication procedures for GMR filters at near-IR wavelengths on concave lens surfaces are discussed, and initial experimental results are presented.

Citation Download Citation

A. T. Cannistra, M. K. Poutous, E. G. Johnson, and T. J. Suleski "Fabrication of guided mode resonance filters on conformal surfaces", Proc. SPIE 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV, 79270Y (14 February 2011); https://doi.org/10.1117/12.876280

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