Development of hard mask resist materials in nanoimprint lithography

Satoshi Takei; Tsuyoshi Ogawa

doi:10.1117/12.881495

15 April 2011 Development of hard-mask resist materials in nanoimprint lithography

Satoshi Takei, Tsuyoshi Ogawa

Proceedings Volume 7972, Advances in Resist Materials and Processing Technology XXVIII; 79722C (2011) https://doi.org/10.1117/12.881495
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

Hard mask resist material on photoreactive underlayer material was investigated to modify the film surface chemical adhesion between resist material and photoreactive underlayer material during ultraviolet irradiation of nanoimprint lithography. This procedure is proven to be suitable for resist material design and the process conditions of ultraviolet curing nanoimprint lithography for the reduction of defect numbers by template contamination when the template was removed from the hard mask resist after ultraviolet irradiation. The developed hard mask type silicon resist material with ultraviolet crosslinking epoxy groups produced high resolutions (80 nm) at a good aspect ratio, and excellent patterning dimensional accuracy by the replication (number of cycles: 32). The newly resist material and the process conditions are expected as one of the defect less nanoimprint lithographic technologies in next generation electronic devices.

Citation Download Citation

Satoshi Takei and Tsuyoshi Ogawa "Development of hard-mask resist materials in nanoimprint lithography", Proc. SPIE 7972, Advances in Resist Materials and Processing Technology XXVIII, 79722C (15 April 2011); https://doi.org/10.1117/12.881495

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available