Source and mask optimization applications in manufacturing

ChinTeong Lim; Vlad Temchenko; Ulrich Klostermann; Vitaliy Domnenko; Jens Schneider; Daniel Sarlette; Ingo Meusel; Dieter Kaiser; Ralf Ploss

doi:10.1117/12.879203

22 March 2011 Source and mask optimization applications in manufacturing

ChinTeong Lim, Vlad Temchenko, Ulrich Klostermann, Vitaliy Domnenko, Jens Schneider, Daniel Sarlette, Ingo Meusel, Dieter Kaiser, Ralf Ploss

Author Affiliations +

Proceedings Volume 7973, Optical Microlithography XXIV; 797322 (2011) https://doi.org/10.1117/12.879203
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

Among available lithography resolution enhancement techniques the Selective Inverse Lithography (SILT) approach recently introduced by authors [1] has been shown to provide the largest process window on lower-NA exposure tools for 65nm contact layer patterning. In present paper we attempt to harness the benefits of source mask optimization (SMO) approach as part of our hybrid RET. The application of source mask optimization techniques further extends the life-span of lower-NA 193nm exposure-tools in high volume manufacturing. By including SMO step in OPC flow, we show that model-based SRAF solution can be improved to approach SILT process variation (PV) band performance. Additionally to OPC, the complexity of embedded flash designs requires a high degree of exposure tool matching and a lithography process optimized for topographically different logic and flash areas. We present a method how SMO can be applied to scanner matching and topography-related optimization.

Citation Download Citation

ChinTeong Lim, Vlad Temchenko, Ulrich Klostermann, Vitaliy Domnenko, Jens Schneider, Daniel Sarlette, Ingo Meusel, Dieter Kaiser, and Ralf Ploss "Source and mask optimization applications in manufacturing", Proc. SPIE 7973, Optical Microlithography XXIV, 797322 (22 March 2011); https://doi.org/10.1117/12.879203

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