Nanoring patterning using surface plasmon assisted photolithography

R. Sidharthan; K. Sathiyamoorthy; V. M. Murukeshan

doi:10.1117/12.894397

26 July 2011 Nanoring patterning using surface plasmon assisted photolithography

R. Sidharthan, K. Sathiyamoorthy, V. M. Murukeshan

Proceedings Volume 8001, International Conference on Applications of Optics and Photonics; 80011P (2011) https://doi.org/10.1117/12.894397
Event: International Conference on Applications of Optics and Photonics, 2011, Braga, Portugal

Abstract

Achievable resolution of nano-rings, fabricated using commonly employed conventional mask based photolithography, is limited by diffraction of light. In this work conventional photolithography is modified to incorporate the phenomenon of surface plasmons to overcome the diffraction limit and thus to fabricate nano rings. Here, an embedded-amplitude mask based surface plasmon lithography is numerically investigated to conceptalize a noval methodology to fabricate the proposed nano-ring structure. Results of FDTD simulation shows sharp transmission peaks at the hole edges which could be recorded using suitable thinned photoresist to obtain nano ring structures.

Citation Download Citation

R. Sidharthan, K. Sathiyamoorthy, and V. M. Murukeshan "Nanoring patterning using surface plasmon assisted photolithography", Proc. SPIE 8001, International Conference on Applications of Optics and Photonics, 80011P (26 July 2011); https://doi.org/10.1117/12.894397

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available