Study of a large range metrological atomic force microscope applied for calibration of a vertical PZT stage

S. H. Wang; S. L. Tan; G. Xu

doi:10.1117/12.883334

1 June 2011 Study of a large range metrological atomic force microscope applied for calibration of a vertical PZT stage

S. H. Wang, S. L. Tan, G. Xu

Proceedings Volume 8036, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences; 80360R (2011) https://doi.org/10.1117/12.883334
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

In this paper, a method for the calibration of vertical PZT stages using a large range metrological atomic force microscope (LRM-AFM) is described. A vertical PZT stage is mounted onto the system and an optical-flat sample is attached on the top of the PZT stage. The AFM probe working in the contact mode is used as a null indicator which is sensitive to the movement of the optical-flat sample directly driven by the vertical PZT stage. At each state of the PZT stage movement, the AFM probe approaches to the test surface without horizontal scanning in the system. The displacement of the vertical stage is measured by the laser interferometer in LRM-AFM and the corresponding laser interferometer readings and the movements of the PZT stage are recorded. All collected data are retrieved to establish the relationship of the laser interferometer reading versus the PZT stage displacement. The results show that the system is capable of calibrating PZT stage in the range of up to 250 μm with an expanded uncertainty of less than 5 nm.

Citation Download Citation

S. H. Wang, S. L. Tan, and G. Xu "Study of a large range metrological atomic force microscope applied for calibration of a vertical PZT stage", Proc. SPIE 8036, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences, 80360R (1 June 2011); https://doi.org/10.1117/12.883334

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KEYWORDS

Ferroelectric materials

Atomic force microscopy

Calibration

Interferometers

Metrology

Atomic force microscope

Sensors

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