Wireless SAW sensor for high temperature applications: material point of view

Omar Elmazria; Thierry Aubert

doi:10.1117/12.889165

3 May 2011 Wireless SAW sensor for high temperature applications: material point of view

Omar Elmazria, Thierry Aubert

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 806602 (2011) https://doi.org/10.1117/12.889165
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

In addition to being small, simple and robust, surface acoustic wave (SAW) devices have the advantage of being passive (batteryless), remotely requestable (wireless) and inexpensive if fabricated on a large scale. The use of SAW devices as passive and wireless sensors allows them to operate in extreme conditions such as those with high levels of radiation, high temperatures up to 1000°C, or electromagnetic interference, in which no other wireless sensor can operate. This is obviously conditioned by the fact that the materials constituting the device can withstand these harsh conditions. General principle of the SAW sensor in wireless configuration is developed and a review of recent works concerning the field of high temperature applications is presented with a specific attention given to the characterization of materials constituting the SAW device: piezoelectric substrate and metallic electrodes.

Citation Download Citation

Omar Elmazria and Thierry Aubert "Wireless SAW sensor for high temperature applications: material point of view", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 806602 (3 May 2011); https://doi.org/10.1117/12.889165

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