Fabrication of low loss coplanar waveguides on gold-doped Czochralski-silicon

A. Abuelgasim; Kanad Mallik; P. Ashburn; C. H. De Groot

doi:10.1117/12.886552

3 May 2011 Fabrication of low loss coplanar waveguides on gold-doped Czochralski-silicon

A. Abuelgasim, Kanad Mallik, P. Ashburn, C. H. De Groot

Proceedings Volume 8068, Bioelectronics, Biomedical, and Bioinspired Systems V; and Nanotechnology V; 806811 (2011) https://doi.org/10.1117/12.886552
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

Coplanar waveguides fabricated on gold-doped Czochralski-silicon show reduced losses. Gold atoms implanted into silicon substrates compensate for background free carriers introduced by impurities in the material. This leads to an increased silicon resistivity which exhibits lower microwave absorption. High frequency measurements in 1-40 GHz range of coplanar waveguides fabricated on gold-doped silicon show attenuation reductions up to 70%, highlighting the benefits of deep level compensation of shallow level impurities in silicon using gold.

Citation Download Citation

A. Abuelgasim, Kanad Mallik, P. Ashburn, and C. H. De Groot "Fabrication of low loss coplanar waveguides on gold-doped Czochralski-silicon", Proc. SPIE 8068, Bioelectronics, Biomedical, and Bioinspired Systems V; and Nanotechnology V, 806811 (3 May 2011); https://doi.org/10.1117/12.886552

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