Improvement of polymer type EB resist sensitivity and line edge roughness

Makoto Otani; Hironori Asada; Hosei Tsunoda; Masashi Kunitake; Takehiko Ishizaki; Ryuji Miyagawa

doi:10.1117/12.897792

19 May 2011 Improvement of polymer type EB resist sensitivity and line edge roughness

Makoto Otani, Hironori Asada, Hosei Tsunoda, Masashi Kunitake, Takehiko Ishizaki, Ryuji Miyagawa

Proceedings Volume 8081, Photomask and Next-Generation Lithography Mask Technology XVIII; 808107 (2011) https://doi.org/10.1117/12.897792
Event: Photomask and NGL Mask Technology XVIII, 2011, Yokohama, Japan

Abstract

In order to improve sensitivity and line edge roughness (LER) for electron beam (EB) lithography, the positive-type polymer resists with various molecular weights and controlled dispersion were newly synthesized and examined. The synthesized resists have the same composition as ZEP520A (Nippon Zeon). With the low molecular and the narrow dispersion resist, improvements of both the sensitivity and LER are confirmed by obtaining the SEM images of line and space resist patterns exposed by EB writing system at an acceleration voltage of 100 kV. The polymer resist with molecular weight (Mw: 30k) and dispersion (1.4) exhibited 22 nm hp resolution, 20% improved LER and 15 % improved sensitivity compared with original ZEP520A.

Citation Download Citation

Makoto Otani, Hironori Asada, Hosei Tsunoda, Masashi Kunitake, Takehiko Ishizaki, and Ryuji Miyagawa "Improvement of polymer type EB resist sensitivity and line edge roughness", Proc. SPIE 8081, Photomask and Next-Generation Lithography Mask Technology XVIII, 808107 (19 May 2011); https://doi.org/10.1117/12.897792

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available