Photoresist roughness characterization in additive lithography processes for the fabrication of phase-only optical vortices

Zahra Hosseinimakarem; Menelaos K. Poutous; Eric G. Johnson

doi:10.1117/12.909719

14 February 2012 Photoresist roughness characterization in additive lithography processes for the fabrication of phase-only optical vortices

Zahra Hosseinimakarem, Menelaos K. Poutous, Eric G. Johnson

Author Affiliations +

Proceedings Volume 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V; 82491M (2012) https://doi.org/10.1117/12.909719
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

The roughness on the surface of phase-only micro-optical elements can limit their performance. An optical vortex phase element was fabricated by using additive lithography with an optimized process to have minimal surface roughness. Thick photoresist was used in order to obtain the appropriate dynamic range for the desired phase profile. We investigated the effects of both post applied and post exposure baking processes, as well as the effects of surfactant in the developer. We found the resist surface roughness to be a function of both the temperature and the time of the respective bakes, as well as the developer surfactant content.

Citation Download Citation

Zahra Hosseinimakarem, Menelaos K. Poutous, and Eric G. Johnson "Photoresist roughness characterization in additive lithography processes for the fabrication of phase-only optical vortices", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82491M (14 February 2012); https://doi.org/10.1117/12.909719

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available