Evaluation of ordering of directed self-assembly of block copolymers with pre-patterned guides for bit patterned media

Takeshi Okino; Takuya Shimada; Akiko Yuzawa; Ryosuke Yamamoto; Naoko Kihara; Yoshiyuki Kamata; Akira Kikitsu; Takashi Akahane; You Yin; Sumio Hosaka

doi:10.1117/12.916304

21 March 2012 Evaluation of ordering of directed self-assembly of block copolymers with pre-patterned guides for bit patterned media

Takeshi Okino, Takuya Shimada, Akiko Yuzawa, Ryosuke Yamamoto, Naoko Kihara, Yoshiyuki Kamata, Akira Kikitsu, Takashi Akahane, You Yin, Sumio Hosaka

Author Affiliations +

Proceedings Volume 8323, Alternative Lithographic Technologies IV; 83230S (2012) https://doi.org/10.1117/12.916304
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

Bit patterned media (BPM) is a promising candidate for next-generation magnetic recording media beyond 2.5 Tb/in2. To realize such high-density patterned media, directed self-assembling (DSA) technology is a possible solution to form fine dots. In order to read and write magnetic signals on a magnetic dot of magnetic media, the position of magnetic dots must be controlled. We examined ordering of directed self-assembly of diblock copolymer dots with a variety of prepatterned guides in some conditions and evaluated the ordering of the dots by using Delaunay triangulation and Voronoi diagram. Applying the optimized conditions, we obtained highly controlled dot pattern suitable for magnetic recording media.

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Takeshi Okino, Takuya Shimada, Akiko Yuzawa, Ryosuke Yamamoto, Naoko Kihara, Yoshiyuki Kamata, Akira Kikitsu, Takashi Akahane, You Yin, and Sumio Hosaka "Evaluation of ordering of directed self-assembly of block copolymers with pre-patterned guides for bit patterned media", Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83230S (21 March 2012); https://doi.org/10.1117/12.916304

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