Resist loss in 3D compact modeling

Xin Zheng; Jensheng Huang; Fook Chin; Aram Kazarian; Chun-Chieh Kuo

doi:10.1117/12.916582

13 March 2012 Resist loss in 3D compact modeling

Xin Zheng, Jensheng Huang, Fook Chin, Aram Kazarian, Chun-Chieh Kuo

Proceedings Volume 8326, Optical Microlithography XXV; 83261C (2012) https://doi.org/10.1117/12.916582
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

An enhancement to compact modeling capability to include photoresist (PR) loss at different heights is developed and discussed. A hypsometric map representing 3-D resist profile was built by applying a first principle approximation to estimate the "energy loss" from the resist top to any other plane of interest as a proportional corresponding change in model threshold, which is analogous to a change in exposure dose. The result is compared and validated with 3D rigorous modeling as well as SEM images. Without increase in computation time, this compact model can construct 3D resist profiles capturing resist profile degradation at any vertical plane. Sidewall angle and standing wave information can also be granted from the vertical profile reconstruction. Since this method does not change any form of compact modeling, it can be integrated to validation and correction without any additional work.

Citation Download Citation

Xin Zheng, Jensheng Huang, Fook Chin, Aram Kazarian, and Chun-Chieh Kuo "Resist loss in 3D compact modeling", Proc. SPIE 8326, Optical Microlithography XXV, 83261C (13 March 2012); https://doi.org/10.1117/12.916582

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available