Fabrication of the microtoroidal and the biconical fiber taper

Changlei Guo; Yantang Huang

doi:10.1117/12.977945

15 October 2012 Fabrication of the microtoroidal and the biconical fiber taper

Changlei Guo, Yantang Huang

Proceedings Volume 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems; 84180G (2012) https://doi.org/10.1117/12.977945
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Microtoroidal is of great use in a wide range of fields including photonics, biosensors, micro-lasers, nonlinear optics, cavity quantum electrodynamics(C-QEDs). In this paper we described ready techniques to fabricate microtoroidals, which included photolithography, isotropic wet etching, and CO₂ laser reflow. Two different methods of fabricating biconical optical fiber tapers were also described, which had potential application in near field coupling with microcavity. One of them was to etch a standard single mode fiber(SMF) with buffered hydrofluoric(BHF) acid solution while another was to heat and pull a SMF under control simultaneously. The taper waists as small as 1~3 μm and insertion loss less than 0.46 dB were obtained easily through the two methods. Finally, The values of Δλ_FSR (Free Spectrum Range) and Q (Quality Factor) of a fiber-taper and microtoroidal coupled system were measured.

Citation Download Citation

Changlei Guo and Yantang Huang "Fabrication of the microtoroidal and the biconical fiber taper", Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84180G (15 October 2012); https://doi.org/10.1117/12.977945

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Etching

Silica

Silicon

Fiber couplers

Wet etching

Photoresist materials

Carbon dioxide lasers

Show All Keywords

Keywords/Phrases

Search In:

Publication Years