Paper
29 November 2012 Low threshold 980-nm tunable vertical-cavity surface-emitting lasers
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Abstract
Low threshold, continuous wavelength tuning micro-electro-mechanically system (MEMS) tunable vertical-cavity surface-emitting lasers (VCSELs) operating at 980 nm are demonstrated. The device utilizes the two-chip concept with a MEMS membrane mirror suspended by an air gap above a VCSEL amplifier. Output power of 4.56 mW with 14μm diameter oxide aperture in continuous operation and tuning range of 6.8nm are obtained. Due to the low optical loss in resonance cavity results in threshold current as low as 0.6 mA at room temperature. Theoretical calculation for the threshold gain as a function of the wavelength and air gap is obtained respectively, which provides the design strategies to improve device performance.
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Guo-Zhu Shi, Bao-Lu Guan, Xia Guo, Shuo Li, Qiang Wang, and Guang-Di Shen "Low threshold 980-nm tunable vertical-cavity surface-emitting lasers", Proc. SPIE 8552, Semiconductor Lasers and Applications V, 85520R (29 November 2012); https://doi.org/10.1117/12.999410
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KEYWORDS
Vertical cavity surface emitting lasers

Microelectromechanical systems

Mirrors

Laser damage threshold

Oxides

Gallium arsenide

Wavelength tuning

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