Novel error mode analysis method for graphoepitaxial directed self-assembly lithography based on the dissipative particle dynamics method

Katsuyoshi Kodera; Shimon Maeda; Satoshi Tanaka; Shoji Mimotogi; Yuriko Seino; Hiroki Yonemitsu; Hironobu Sato; Tsukasa Azuma

doi:10.1117/12.2011439

26 March 2013 Novel error mode analysis method for graphoepitaxial directed self-assembly lithography based on the dissipative particle dynamics method

Katsuyoshi Kodera, Shimon Maeda, Satoshi Tanaka, Shoji Mimotogi, Yuriko Seino, Hiroki Yonemitsu, Hironobu Sato, Tsukasa Azuma

Author Affiliations +

Proceedings Volume 8680, Alternative Lithographic Technologies V; 868015 (2013) https://doi.org/10.1117/12.2011439
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Directed self-assembly lithography (DSAL), which combines self-assembling materials and a lithographically defined prepattern, is a potential candidate to extend optical lithography beyond 22 nm. To take full advantage of DSAL requires diminishing not only systematic error modes but also random error modes by carefully designing a lithographically defined prepattern and precisely adjusting process conditions. To accomplish this with satisfactory accuracy, we have proposed a novel method to evaluate DSAL error modes based on simulations using dissipative particle dynamics (DPD). We have found that we can estimate not only systematic errors but also random errors qualitatively by simulations.

Citation Download Citation

Katsuyoshi Kodera, Shimon Maeda, Satoshi Tanaka, Shoji Mimotogi, Yuriko Seino, Hiroki Yonemitsu, Hironobu Sato, and Tsukasa Azuma "Novel error mode analysis method for graphoepitaxial directed self-assembly lithography based on the dissipative particle dynamics method", Proc. SPIE 8680, Alternative Lithographic Technologies V, 868015 (26 March 2013); https://doi.org/10.1117/12.2011439

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available