A novel nano-scaled force sensor based on silicon photonic crystal

Tianlong Li; Longqiu Li; Wenping Song; Guangyu Zhang; Yao Li

doi:10.1117/12.2012157

9 April 2013 A novel nano-scaled force sensor based on silicon photonic crystal

Tianlong Li, Longqiu Li, Wenping Song, Guangyu Zhang, Yao Li

Proceedings Volume 8691, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013; 86911G (2013) https://doi.org/10.1117/12.2012157
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2013, San Diego, California, United States

Abstract

With advantages of ultra-compact size, high resolution, and easy integration, nano-scaled force sensors based on photonic crystal are widely used in microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS). The performances of these nano-scaled force sensors are mainly determined by the shape nanocavity. The principle of the sensor is that the output wavelength of the force sensor using photonic crystal varies as a function of force and pressure. In this work, a novel three dimensional nano-scaled force sensor based on silicon photonic crystal, in which a nanocavity is embedded in an S-shaped elastic body, is provided and studied numerically. The advantage of this force sensor is that it can be used in the NEMS to measure the component force in the X direction, Y direction and Z direction, simultaneously. The relationship between the force and the output wavelength is determined using finite element method (FEM) and finite difference time-domain method (FDTD).

Citation Download Citation

Tianlong Li, Longqiu Li, Wenping Song, Guangyu Zhang, and Yao Li "A novel nano-scaled force sensor based on silicon photonic crystal", Proc. SPIE 8691, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2013, 86911G (9 April 2013); https://doi.org/10.1117/12.2012157

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available