Analysis and extraction of misalignment errors in a three-in-one composite wave-plate with an equivalent fast axis

Honggang Gu; Shiyuan Liu; Xiuguo Chen; Chuanwei Zhang

doi:10.1117/12.2014580

31 January 2013 Analysis and extraction of misalignment errors in a three-in-one composite wave-plate with an equivalent fast axis

Honggang Gu, Shiyuan Liu, Xiuguo Chen, Chuanwei Zhang

Author Affiliations +

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87593C (2013) https://doi.org/10.1117/12.2014580
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

Misalignment errors of the composite wave-plate, a typical kind of compensator used in spectroscopic ellipsometers (SE), can lead to spurious oscillations in the SE measurement. In this paper, we construct an equivalent model of the three-inone composite wave-plate through mathematical derivation, and propose a method to analyze and extract the misalignment errors of the composite wave-plate. Obvious oscillations have been observed in the equivalent fast axis azimuth of the composite wave-plate through simulations, and these oscillations can be assigned to the angular misalignment errors between the individual plates of the composite wave-plate. The waveforms and amplitudes of the oscillations in the equivalent fast axis azimuth show high sensitivity to angular misalignment errors. Conversely, angular misalignment errors can be accurately extracted from the oscillations in the equivalent fast axis of the composite wave-plate. It is expected that the proposed method for analysis and extraction of misalignment errors can be used to minimize angular misalignment errors and to improve the alignment procedure of the composite wave-plate.

Citation Download Citation

Honggang Gu, Shiyuan Liu, Xiuguo Chen, and Chuanwei Zhang "Analysis and extraction of misalignment errors in a three-in-one composite wave-plate with an equivalent fast axis", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87593C (31 January 2013); https://doi.org/10.1117/12.2014580

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available